東北大学 未来科学技術共同研究センター

桑野・Minh研究室 Kuwano & Minh Lab.

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学術論文

  1. Micromachined multiple focused-ion-beam devices, Journal of Vacuum Science & Technology B, Volume 34 Number 2. 7pp. (2016), Ryo Yoshida, Motoaki Hara, Hiroyuki Oguchi and Hiroki Kuwano
  2. A micro-structured Si-based electrodes for high capacity electrical double layer capacitors, Journal of Physics: Conference Series, Volume 557, conference 1. 5pp. (2015), Valdas Krikscikas, Hiroyuki Oguchi, Hiroshi Yanazawa, Motoaki Hara and Hiroki Kuwano
  3. Microfabricated electrostatic planar lens array and extractors for multi-focused ion beam system using ionic liquid ion source emitter array. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS). pp. 93-96 (2015), Ryo Yoshida, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano
  4. Investigation of surface-acoustic-wave atomization using phase Doppler anemometry, Ultrasonics Symposium (IUS), 2015 IEEE International. 4pp. (2015), Taiki Hirotomto, Motoaki Hara, Hiroki Kuwano, Taku Kudo, Hideaki Kobayashi
  5. Pulsed laser deposition of air-sensitive hydride epitaxial thin films: LiH, APL Materials. Volume 3 Number 9. 6pp. (2015), Hiroyuki Oguchi, Shigehito Isobe, Hiroki Kuwano, Susumu Shiraki, Shin-ichi Orimo and Taro Hitosugi
  6. Current sensors using Fe?B?Nd?Nb magnetic metallic glass micro-cantilevers, Microelectronic Engineering. Volume 135, 5 March 2015. pp. 28-31 (2015), Tuan Anh Phan, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano
  7. Lead-Free (K,Na)NbO3 Impact-Induced-Oscillation Microenergy Harvester, Journal of Microelectromechanical Systems (Volume:24 , Issue: 6 ). pp. 1887-1895 (2015), Le Van Minh, Motoaki Hara, Hiroki Kuwano
  8. Highly piezoelectric MgZr co-doped aluminum nitride-based vibrational energy harvesters [Correspondence], IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (Volume:62 , Issue: 11 ). pp. 2005-2008 (2015), Le Van Minh, Motoaki Hara, Tsuyoshi Yokoyama, Tokihiro Nishihara, Masanori Ueda, Hiroki Kuwano
  9. 積層基板構造による小型広帯域コイルの検討, 日本機械学会論文集, 論文ID: 14-00696. 8pp. (2015), 鈴木 洋一朗, 河野 秀一, 片岡 良平, 木村 友則, 桑野 博喜
  10. 構造ヘルスモニタリングのための表面弾性波素子を利用した高感度ワイヤレスセンサノード, 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）, Vol. 135 No. 9. pp. 367-371 (2015), 包 忠青, 原 基揚, 桑野 博喜
  11. New output power estimation method for cantilever-based piezoelectric energy harvesters, Japanese Journal of Applied Physics, Volume 53, Number 7S. 4pp. (2014), Motoaki Hara, Le Van Minh, Hiroyuki Oguchi and Hiroki Kuwano
  12. A self-converging atomized mist spray device using surface acoustic wave, Microfluidics and Nanofluidics, October 2014, Volume 17, Issue 4. pp. 701-710 (2014), Atsushi Yabe, Yuichiro Hamate , Motoaki Hara, Hiroyuki Oguchi, Sumito Nagasawa, Hiroki Kuwano
  13. High performance nonlinear micro energy harvester integrated with (K, Na)NbO3/Si composite quad-cantilever, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS). pp. 397-400 (2014), Le Van Minh, Motoaki Hara, Hiroki Kuwano
  14. Arrayed micro ion source with ionic liquid for flexible and concurrent MEMS fabrication, Sensors and Actuators A: Physical, Volume 215, 15 August 2014. pp. 161-166 (2014), Tatsuya Suzuki, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano
  15. Epitaxial thin film growth of LiH using a liquid-Li atomic template, Applied Physics Letters 105, 211601. 5pp. (2014), Hiroyuki Oguchi, Tamio Ikeshoji, Takeo Ohsawa, Susumu Shiraki, Hiroki Kuwano, Shin-ichi Orimo and Taro Hitosugi
  16. Concurrent reactive ion etching employing micromachined ionic liquid ion source array, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS). pp. 463-466 (2014), Ryo Yoshida, Motoaki Hara, Hiroyuki Oguchi, Tatsuya Suzuki, Hiroki Kuwano
  17. Surface-Acoustic-Wave-Driven Directional Atomizers Integrated With Pico-Liter Micropumps, Journal of Microelectromechan, Volume:24 Issue:3. pp.696-702 (2014), Shun Sugimoto, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano
  18. Surface-acoustic-wave driven point source atomizer integrated with picoliter micro pumps for polymeric nanoparticles synthesis. 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS). pp. 1043-1046 (2014), Shun Sugimoto, Motoaki Hara, Hiroyuki Oguchi, Atsushi Yabe, Hiroki Kuwano
  19. Experimental study on low-power wireless monitor of rotary motion using improved energy harvesting system with piezoelectric element, IEEE SENSORS 2014 Proceedings. pp. 174-177 (2014), Hitoshi Kitayoshi, Kunio Sawaya, Hiroki Kuwano
  20. Q-enhancement with electrode materials in the FBAR for timing devices, 2014 IEEE International Ultrasonics Symposium. pp. 2023-2026 (2014), Motoaki Hara, Hiroki Kuwano
  21. Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS). pp. 636-639 (2014), Qi Wang, Hiroyuki Oguchi, Motoaki Hara, Hiroki Kuwano
  22. レーザビーム走査型管内形状センサによる管路うねり形状の測定, 日本機械学会論文集, Vol. 80 No. 813. 10pp. (2014), 水沼 守, 桑野 博喜
  23. 管内形状センサを用いた管路うねり形状測定の高精度化に関する検討, 日本機械学会論文集, Vol. 80 No. 819. 11pp. (2014), 水沼 守, 桑野 博喜
  24. Bulk micromachined energy harvesters employing (K, Na)NbO3 thin film, Journal of Micromechanics and Microengineering, Volume 23, Number 3. 6pp. (2013), Le Van Minh, Motoaki Hara, Fumimasa Horikiri, Kenji Shibata, Tomoyoshi Mishima and Hiroki Kuwano
  25. Ferroelectric dipole electrets for output power enhancement in electrostatic vibration energy harvesters, Appl. Phys. Lett. 103, 162901. 4pp. (2013), Haruhiko Asanuma, Hiroyuki Oguchi, Motoaki Hara, Ryo Yoshida and Hiroki Kuwano
  26. Lead-free (K, Na)NbO3 based impact type energy harvesters integrated with a cylindrical cavity for metal ball, Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on. pp. 833-836 (2013), Le Van Minh, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano
  27. Oscillator-based strain gauges employing surface acoustic wave resonators for wireless sensor network, 2013 IEEE International Ultrasonics Symposium (IUS). pp. 1930-1933 (2013), Tomokatsu Konno, Motoaki Hara, Hiroki Kuwano
  28. Ultra low power wireless ECG sensor tag with wearable antenna, SENSORS, 2013 IEEE. 4pp. (2013), Hitoshi Kitayoshi, Kunio Sawaya, Hiroki Kuwano
  29. Micro-Energy Harvesters Integrated with a Quatrefoil-Shaped Proof Mass Suspended by Multiple (K,Na)NbO3 Beams, Japanese Journal of Applied Physics, Volume 52, Number 7S. 4pp. (2013), Le Van Minh, Motoaki Hara and Hiroki Kuwano
  30. Ionic-liquid micro ion source array for flexyble concurrent MEMS process, Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on. pp. 315-318 (2013), Tatsuya Suzuki, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano
  31. Surface acoustic wave based sensors employing ionic liquid for hydrogen sulfide gas detection, Microsystem Technologies, August 2013, Volume 19, Issue 8. pp. 1255-1259 (2013), Yoshinobu Murakawa, Motoaki Hara , Hiroyuki Oguchi, Yuichiro Hamate, Hiroki Kuwano
  32. A spontaneous polarization electret for electrostatic vibration energy harvesting. 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). pp.1332-1335 (2013), H. Asanuma, H. Oguchi, M. Hara, H. Kuwano
  33. Micromachined Pyroelectric Probe for Non-Contact Thermal Diagnostic Systems, Journal of Advanced Mechanical Design, Systems, and Manufacturing. Vol. 7 No. 2. pp. 95-102 (2013), Kenji SUITA, Motoaki HARA, Shinya ISHIKAWA, Katsuhiro TANAKA, Sumito NAGASAWA, Hiroki KUWANO
  34. ステンレスを基材とするZnO振動型エナジーハーベスタの開発, 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）, Vol. 133 No. 4. pp. 126-127 (2013), 細川 翔多, 原 基揚, 大口 裕之, 桑野 博喜
  35. Micro-Energy Harvesters Integrated with a Quatrefoil-Shaped Proof Mass Suspended by Multiple (K,Na)NbO3 Beams, Jpn. J. Appl. Phys. 52 07HD08 (4 pages) (2013), Le Van Minh, Motoaki Hara, and Hiroki Kuwano
  36. Bulk micromachined energy harvesters employing (K, Na)NbO3 thin film, J. Micromech. Microeng. 23 035029 (6pp) (2013), Le Van Minh, Motoaki Hara, Fumimasa Horikiri, Kenji Shibata, Tomoyoshi Mishima, and Hiroki Kuwano
  37. Surface acoustic wave based sensors employing ionic liquid for hydrogen sulfide gas detection, Microsyst Technol, Vol.19 Issue 8, pp. 1255-1259 (2013), Y. Murakawa, M. Hara, H. Oguchi, Y. Hamate, H. Kuwano
  38. Spurious Suppression without Energy Dissipation in Aluminum--Nitride-Based Thin-Film Bulk Acoustic Resonator Using Thin Ring on Electrode Edge, Japanese Journal of Applied Physics 51 07GC11 (2012), Motoaki Hara and Hiroki Kuwano
  39. Experimental Study of Highly Sensitive Sensor Using a Surface Acoustic Wave Resonator for Wireless Strain Detection, Japanese Journal of Applied Physics, Volume 51, Issue 7, pp. 07GC23-07GC23-4 (2012), Bao Zhongqing, Hara Motoaki, Mitsui Misato, Sano Koji, Nagasawa Sumito, Kuwano Hiroki
  40. Microstructure and piezoelectric properties of AlN thin films grown on stainless steel for the application of vibration energy harvesting, Micro & Nano Letters, Vol. 7, pp. 1170--1172 (2012), Jin Y. Zhang, Ziping Cao, Qi Wang, Hiroki Kuwano
  41. Sodium-ion conduction in complex hydrides NaAlH4 and Na3AlH6, J. Appl. Phys., 111, 036102- (2012), H. Oguchi, M. Matsuo, S. Kuromoto, H. Kuwano
  42. Design and characterization of miniature piezoelectric generators with low resonant frequency, Sensors and Actuators A: Physical,179, pp. 178-184 (2012), Ziping Cao, Jinya Zhang, Hiroki Kuwano
  43. Optimal geometry of a parallelized electret-based vibration energy harvester, SMART MATERIALS AND STRUCTURES,21(6),065001- (2012), Okamoto, Y Hamate, L Xu, and H Kuwano　
  44. Fabrication and Characterization of an FeBNdNb Magnetic Metallic Glass Thin Film, Jpn. J. Appl. Phys., 51, 055803- (2012), Tuan Anh Phan, Sangmin Lee, Akihiro Makino, Hiroyuki Oguchi, Hiroshi Okamoto, and Hiroki Kuwano
  45. Fabrication of Low Residual Stress AlN thin film and Their Application for Micrognerators for Vibration Energy Harvesting, Jan. J. Applied Physics, 50, 09ND18 (2011), Jinya Zhang, Ziping Cao, Hiroki Kuwano
  46. Vibration Energy Harvesting Characterization of 1cm2 PVDF, Jan. J. Applied Physics, 50, 09ND15 (2011), Ziping Cao, Jinya Zhang, Hiroki Kuwano
  47. Fabrication of Low-Residual-Stress AlN Thin Films and Their Application to Microgenerators for Vibration Energy Harvesting, Japanese Journal of Applied Physics 50, 09ND18 (2011), Jinya Zhang, Ziping Cao, and Hiroki Kuwano
  48. Experimental Duffing oscillator for broadband piezoelectric energy harvesting, Smart Mater. Struct. 20 102001 (10pp) (2011), Gael Sebald, Hiroki Kuwano, Daniel Guyomar, and Benjamin Ducharne
  49. Energy Harvester of 1.5 cm3 Giving Output Power of 2.6 mW with Only 1 G Acceleration, Jounal of Intelligent Material Systems and Structures, 22, pp. 415-420 (2011), D. Guyomar, G. Sebald , H. Kuwano
  50. Design and fabrication of PZT microcantilevers with freestandingstructure, Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, 17(8), pp. 1393-1400 (2011), Cao Ziping, Zhang Jinya, Kuwano Hiroki
  51. Simulation of a Duffing oscillator for broadband piezoelectric energy harvesting, Smart Materials and Structures,20(7), 075022-17 (2011), Gael Sebald, Hiroki Kuwano, Daniel Guyomar, Benjamin Ducharne
  52. Fabrication of Low Residual Stress AlN thin film and Their Application for Micrognerators for Vibration EnergyHarvesting, Jan. J. Applied Physics, 50, 09ND18 (2011), Jinya Zhang, Ziping Cao, Hiroki Kuwano
  53. Vibration Energy Harvesting Characterization of 1cm2 PVDF, Jan. J. Applied Physics, 50, 09ND15 (2011), Ziping Cao, Jinya Zhang, Hiroki Kuwano
  54. Design and fabrication of PZT microcantilever with freestanding structure, Microsystem Technology, Vol.17, No.8, pp.1393-1400 (2011), Ziping Cao, Jinya Zhang, Hiroki Kuwano
  55. 水晶振動子式化学センサにおける高分解能周波数検手法, 電気学会論文誌Ｅ, 130(9), pp. 431-436 (2010), 小川茂樹, 瀬山倫子, 桑野博喜
  56. Lithium-ion conduction in complex hydrides LiAlH4 and Li3AlH6, JOURNAL OFAPPLIED PHYSICS,107(9), 096104(3p) (2010), Oguchi H, Matsuo M, Sato T, Takamura H, Maekawa H, Kuwano H, Orimo S
  57. 周期的微細構造によるSAW位相・周波数変調デバイス, 日本機械学会論文集C編, 第76巻, pp. 1942-1944 (2010), 宮下雅広, 小貫哲平, 長澤純人, 桑野博喜
  58. 表面弾性波を用いた新しいマイクロ流体デバイスの研究, 日本機械学会論文集C編, 第76巻, pp. 1920-1922 (2010), 佐野拓也, 北條真紀, 濱手雄一郎, 小貫哲平, 桑野博喜
  59. 表面微細構造による輻射場操作を用いた放熱技術の検討, 日本機械学会論文集C編, 第76巻, pp. 1917-1919 (2010), 小貫哲平, 桑野博喜
  60. フレキシブル・同時並行MEMSプロセスを目指したマイクロイオン源の開発, 日本機械学会論文集C編,第76巻, pp. 1902-1904 (2010), 田面木真也, 上田智之, 黒津正彦, 長澤純人, 桑野博喜
  61. Efficient Energy Harvesting from Irregular Mechanical Vibrations by Active Motion Control, J. Microelectromech. Systems, 18, pp. 1430-1431 (2009), Hiroshi Okamoto, Teppei Onuki, Sumito Nagasawa, and Hiroki Kuwano
  62. Low resistive copper films deposited using ion beam sputtering method with ultra-high purity target, Journal of Micromechanics and Microengineering, 19, 094017(6p) (2009), Teppei Onuki and Hiroki Kuwano
  63. The advantages and potential of electret-based vibration-driven micro energy harvesters, Int. J. Energy Res. Int. J. Energy Res., 33, pp. 1180-1190 (2009), Hiroshi Okamoto, Takafumi Suzuki, Kazuhiro Mori, Ziping Cao, Teppei Onuki, and Hiroki Kuwano
  64. Improving an electret transducer by fully utilizing the implanted charge, Applied Physics Letters, 93, pp. 1-3 (2008), H. Okamoto, T. Onuki, S. Nagasawa, and H. Kuwano
  65. 温度補償型超音波式液面レベル計の開発, 電気学会論文誌E, Trans IEE of Japan, Vol. 122-E, pp.447-451 (2002), 小川茂樹, 桑野博喜
  66. Development of miniature matrix relays for telecommunication systems, Advances in Information Storage Systems, Vol. 10, pp.275-287 (1999), Hiroshi Hosaka, Hiroki Kuwano, and Koshi Murata
  67. Ultrasonic signal transmission technologies for compact microtunneling system, Journal of Testing and Evaluation, Vol.29, pp.114-121 (1999), K. Honjo, K. Hoshiya, S. Nakano, and H. Kuwano
  68. レーザビーム走査型管路検査センサの光学設計, 精密工学会誌, 第64巻, pp.251-255 (1998), 水沼守, 桑野博喜, 小川茂樹
  69. プラズマ有機薄膜による環境ガスセンシング, 電気学会論文誌E, Trans.IEE of Japan, Vol.118-E, pp.86-91 (1998), 杉本岩雄, 中村雅之, 桑野博喜, 嶋田礼子
  70. Microfabrication of micro-tip on photocantilever for near-field scanning microscopy and investigation of effect of micro-tip shape on apatial resolution, J. Appl. Phys. 83, pp.3547-3551 (1998), Y. Tanaka, K. Fukuzawa, and H. Kuwano
  71. 学習ベクトル量子化を用いた水晶発振子式化学センサ応答のパターン認識, 計測自動制御学会論文集, Vol.34, pp.877-883 (1998), 中村雅之, 杉本岩雄, 桑野博喜
  72. 水晶発振子化学センサを用いた燃焼ガス検知試験, 電気学会論文誌E, Trans.IEE of Japan, Vol.118-E, pp.42-47(1998), 中村雅之, 杉本岩雄, 桑野博喜
  73. A microvalve matrix using piezoelectric actuators, Microsystem Technologies, Vol.3, pp.107-113 (1997), Toshio Watanabe and Hiroki Kuwano
  74. Structures and vapor-sorption characteristics of sputtered polychlorotrifuoroetylene films treated by hydrogen-plasma, Thin Solid Films, 310, pp.303-309 (1997), Iwao Sugimoto, Masayuki Nakamura, Hiroki Kuwano, Reiko Shimada
  75. Ultrasonic signal-transmission techniques for compact microtunneling systems, 電気学会論文誌E, Trans. IEE of Japan, Vol. 117-E, pp.456-464 (1997), Katsuhiko Honjo, Kunio Hoshiya, Sadahiko Nakano, and Hiroki Kuwano
  76. 櫛歯状マイクロ振動子における連成振動の解析, 精密工学会誌, 第63巻, pp.977-981 (1997), 大沢孝夫, 阿部浩士, 保坂寛, 桑野博喜, 板生清
  77. 窒素イオンビームを用いたポリイミド膜の高アスペクト比微細加工, 電気学会論文誌E, Trans. IEE of Japan, Vol.117-E, pp.39-44 (1997), 柳沢佳一, 桑野博喜, 中野聡子
  78. Reduction of microvalve leakage based on precise measurement of flow conductance, 電気学会論文誌E, Trans. IEE of Japan, Vol. 117-E, pp.622-626 (1997), Motohisa Hirano, Keiichi Yanagisawa, Hiroki Kuwano, and Satoko Nakano
  79. Sensitive, selective chemical-sensing layers produced by plasma organic film technology, Sensors and Actuators, B37, pp.163-168 (1996) Iwao Sugimoto, Masayuki Nakamura, Hiroki Kuwano
  80. Chemical-sensing structure, direction, and quantification of plasma-organic films with α-amino acid, Sensors and Actuators, B35-36, pp.342-347 (1996), Iwao Sugimoto, Masayuki Nakamura, Hiroki Kuwano
  81. Application of plasma-polymer film-coated sensors to gas identification using linear filters, Sensors and Actuators, B33, pp.122-127 (1996), Masayuki Nakamura, Iwao Sugimoto, Hiroki Kuwano
  82. Microfabricated phtocantilever for simultaneous NSOM and AFM of optical materials, 電気学会論文誌E, Trans. IEE of Japan, Vlo.116-E, pp.136-142 (1996), Kenji Fukuzawa, Yuriko Tanaka, Shinya Akamine, and Hiroki Kuwano
  83. Effects of heavy plasma atoms on spin centers in reactively sputtered SiN films, Thin Solid Films, 278, pp.61-66 (1996), Iwao Sugimoto, Hiroki Kuwano, Satoko Nakano
  84. Scanning near-field optical microscope cantilever with integrated photodiode, Applied Physics Letters, Vol.68, pp.579-581 (1996), Shinya Akamine, Hiroki Kuwano, and Hirofumi Yamada
  85. Scattering of evanescent light by a finite-size probe in near-field scanning optical microscopy, J. Appl, Phys. 80, pp.4799-4803 (1996), Kenji Fukuzawa and Hiroki Kuwano
  86. Conversion evanescent into propagating light in near-field scanning optical microscopy, J. Appl. Phys. 79, pp.8174-8178 (1996), Kenji Fukuzawa and Hiroki Kuwano
  87. Photoelectrical cell utilizing bacteriorhodopsin on a hole array fabricated by micromachining techniques, Sensors and Actuators, B30, pp.121-126 (1996), Kenji Fukuzawa, Kei-ichi Yanagisawa, Hiroki Kuwano
  88. Imaging of organic molecular films using a scanning near-field optical microscope combined with an atomic force microscope, J. Vac. Sci. Technol. B14, pp.812-815 (1996), Hirofumi Yamada Hiroshi Tokumoto, Shinya Akamine, Kenji Fukuzawa, and Hiroki Kuwano
  89. Electromagnetically driven microvalve, Microsystem Technologies, Vol. 2, pp.22-25 (1995), K. Yanagisawa, H. Kuwano, A. tago
  90. Imaging of optical and topographical distributions by simultaneous near field scanning optical/atomic force microscopy with a micro fabricated photocantilever, J. Appl. Phys. 78, pp.7376-7381 (1995), Kenji Fukuzawa, Yuriko Tanaka, Shinya Akamine, and Hiroki Kuwano
  91. Tensilely-stressed SiN films reactively sputtered in Kr-N2 plasmas for producing free-standing devices, Thin Solid Films, 268, pp.152-162 (1995), Iwao Sugimoto, Satoko Nakano, Hiroki Kuwano
  92. プラズマポリマー薄膜を用いた化学センシングシステムへの線形フィルタの適用, 計測自動制御学会論文集, Vol.31, pp.437-443 (1995), 中村雅之, 杉本岩雄, 桑野博喜
  93. Photoelectrical responses of dried purple membrane film in blue form and acid purple form, J. Intelligent Material Systems and Structures, Vol.5, pp.743-748 (1994), Kenji Fukuzawa, Hiroki Kuwano and Toshikazu Majima
  94. Characterization of hydrogen and oxygen atoms in SiN films produced by plasma-enhanced reactive sputtering, J. Vac. Sci. Technol. A12, pp.2859-2866 (1994), Iwao Sugimoto, Masayuki Nakamura, and Hiroki Kuwano, Satoko Nakano, Akio Tago
  95. Electromagnetic microrelays: concepts and fundamental characteristics, Sensors and Actuators, A 40, pp.41-47 (1994), Hiroshi Hosaka, Hiroki Kuwano and Keiichi Yanagisawa
  96. Self-multilayered structures of SiN films prepared by plasma-enhanced reactive sputtering, J. Appl. Phys. 76, pp.8097-8104 (1994), Iwao Sugimoto, Satoko Nakano, and Hiroki Kuwano
  97. Enhanced saturation of sputtered amorphous SiN film frameworks using He- and Ne-penning effects, J. Appl. Phys. 75, pp.7710-7717 (1994), Iwao Sugimoto, Satoko Nakano, Hiroki Kuwano
  98. New high-power fast atom beam source, J. Vac. Sci. Techonol. A12, pp.2739-2744 (1994), Fusao Shimokawa and Hiroki Kuwano
  99. 球圧子押し込みによる薄膜の応力分布の近似式（膜厚が非常に薄い場合）, 日本機械学会論文集（Ａ編）, 60巻570号, pp.416-420 (1994-2), 香川博之, 市川昌弘, 高橋徹, 桑野博喜
  100. 球圧子押し込みによる薄膜・基板接合対の応力分布の弾塑性有限要素解析（薄膜の破壊強度評価を目的として）, 日本機械学会論文集（Ａ編）, 60巻570号, pp.409-415 (1994-2), 香川博之, 市川昌弘, 高橋徹, 桑野博喜
  101. 微小球圧子押し込みによる薄膜の破壊強度評価, 日本機械学会論文集（Ａ編）, 60巻570号, pp.396-401 (1994-2),香川博之, 市川昌弘, 高橋徹, 桑野博喜
  102. ミニチュアマトリクスリレーの試作と動作解析, 精密工学会誌, 第60巻, pp.1132-1136 (1994), 保坂寛, 桑野博喜
  103. レーザビーム走査法を用いた管路内面形状測定における欠陥検出の試み，精密工学会誌，第60巻，pp.1335-1339 (1994), 水沼守，小川茂樹，桑野博喜
  104. 流路内におけるカプセルの挙動とその定性的解析, 混相流, 第8巻, pp.213-219 (1994), 松前裕司, 富田侑嗣, 片岡勲, 船津勝也, 伊藤博之, 桑野博喜, 金田公正, 堀井清之
  105. Organic Gas Sorption Characteristics of plasma-deposited amino acid films, Analytical Chemistry, Vol. 66, pp.4316-4323 (1994), Iwao Sugimoto, Masayuki Nakamura, and Hiroki Kuwano
  106. Chemical sensing by analyzing dynamics of plasma polymer film-coated sensors, Sensors and Actuators, B20, pp.231-237 (1994), Masayuki Nakamura, Iwao Sugimoto, Hiroki Kuwano, and Robert Lemos
  107. A displacement measurement method by laser-beam scanning for mapping the interior geometry of pipes, Transactions of the ASME, Vol.116, pp.188-192 (1994), M. Mizunuma, S. Ogawa, C. Nishimura, H. Kuwano
  108. Organic gas sorption by chemical-sensing fluoropolymer films prepared by radio-frequency sputtering, Thin Solid Films, 249, pp.118-125 (1994), I.Sugimoto, M. Nakamura, and Hiroki Kuwano
  109. Chemical sensing system using plasma polymer films and pattern recognition algorithm, J. Intelligent Material Systems and Structures, Vol.5, pp.315-320 (1994), Masayuki Nakamura, Iwao Sugimoto, and Hiroki Kuwano
  110. Energy distribution and formation mechanism of fast atoms in a fast atom beam, J. Appl. Phys. 72, pp.13-17 (1993), Fusao Shimokawa and Hiroki Kuwano
  111. 水を満たした送水管を利用した超音波信号の伝送に関する実験結果, 非破壊検査, 第43巻, pp.282-284 (1993), 本庄克彦, 中野貞彦, 小川茂樹, 星谷邦夫, 桑野博喜
  112. Molecular sensing using plasma polymer thin-film probes, Sensors and Actuators, B10, pp.117-122 (1993), Iwao Sugimoto, Masayuki Nakamura, Hiroki Kuwano
  113. Thermal and ion-induced reactions in titanium thin films on boron phosphide(100), J. Materials Science letters, 11, pp29-32 (1992), Li J., Mayer J.W., Kobayashi N., Kawashiro Y., Kuwano H.
  114. 超微小硬度による弾性定数の評価, 非破壊検査, 第42巻, pp.94-100 (1992), 香川博之, 市川昌弘, 高松徹, 桑野博喜
  115. 官内形状検査用レーザビーム走査型距離測定法,　精密工学会誌, 第57巻, 1856-1861 (1991), 水沼守, 小川茂樹, 西村力, 桑野博喜
  116. Fast atom beam technique and its application for BN and other hard coatings, Materials Science Forum, Vols.54&55, pp.339-415 (1990) (Invited), H. Kuwano
  117. Resistivity and morphology of TiSi2 formed on Xe+-implanted polycrystalline silicon, Appl. Phys. Lett. 56, pp.440-442 (1990), Hiroki Kuwano, J.R.Phillips, and J. W. Mayer
  118. Silicon dioxide fine patterning by reactive fast atom beam etching, J. Vac. Sci. Technol. B6, pp.1565-1569 (1988), H. Kuwano and F. Shimokawa
  119. Friction-reducing coating by dual fast atom technique, J. Vac. Sci. Technol. A4, pp.2993-2996 (1986), H. Kuwano and K. Nagai
  120. Thin solid lubrication film formation by fast atom bombardment sputter deposition, J. Vac. Sci. Technol. A3, pp.1809-1812 (1985), H. Kuwano and K. Nagai
  121. Resist patterning and X-ray mask fabrication employing focused ion beam exposure and subsequent dry etching, J. Vac. Sci. Technol. B3, pp.1357-1361 (1985), H. Kuwano, H. Takaoka, and A. Ozawa
  122. Dry development of resists exposed to low-energy focused gallium ion beam, J. Appl. Phys. 55, pp.1149-1154 (1984), H. Kuwano
  123. An ion beam exposure, Bull. Japan Soc. Prec. Eng. Vol. 16, pp.273-274 (1982), H. Kuwano
  124. Dry cleaning of Si surface contamination by reactive sputter etching, Jpn. J. Alppl. Phys. 21, pp.529-533 (1982), H.Kuwano, S.Miyake and T. Kasai
  125. クロムモリブデン鋼の応力腐食割れと腐食疲労の比較研究、日本機械学会論文集（A）, 47巻, pp.689-697(1981), 横堀武夫, 桑野博喜, 滝沢英樹
  126. 反応性イオンエッチングを用いたSi半導体基板の表面処理に関する研究, 精密機械, 47巻、pp.1483-1489(1981), 三宅正二郎, 桑野博喜
  127. Dry development of resist exposed to focused gallium ion beam, Jpn. J. Appl. Phys. 19, ppL615-617(1980), H.Kuwano, K.Yoshida, and S.Yamazaki
  128. 耐腐食アルミニウム合金の腐食疲労, 日本材料強度学会誌, 第12巻, pp.91-95(1977), 桑野博喜, 牛木宗男, 滝沢英樹, 山田仁, 横堀武夫
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